Purification & Filtration
Microelectronics
Liquid filtration and dissolved gas control solutions for microelectronic manufacturing
From helping to reduce contaminants to improving your process efficiencies, take your microelectronics manufacturing to the next level with our reliable and scalable filtration and dissolved gas control solutions.
3M™ Betapure™ AU Series Filter Capsule
We set a high standard of filtration with our Betapure™ AU Series Filter Capsules. This capsule is a polypropylene encapsulated filter that does not require a separate filter vessel. Available in a wide range of configuration, including sanitary flange and hose barb connections, the 2.5″ and 5″ capsules are ideal for small batch and filter test applications.
3M™ NanoSHIELD™ Hollow Fiber Series Filter Cartridge
3M™ NanoSHIELD™ Hollow Fiber Series filter cartridge is available with membrane material of construction of polypropylene, polyethylene and nylon. 3M™ NanoSHIELD™ hollow fiber series filters have been engineered to combine a high level of particle retention with high flow rates and low pressure drop for the most demanding applications in the latest technology node.
3M™ Metal Ion Purifier APP Series Filter Cartridge
3M™ Metal Ion Purifier APP Series Filter Cartridges help reduce metal ion contamination in photoresist and other high purity chemicals in the microelectronics industry.
3M™ CTG-Klean System Filter Pack with Micro-Klean™ RT Series Cartridge
The 3M™ CTG-Klean System Filter Pack with Micro-Klean™ RT Series Cartridge is part of an enclosed system that uses a separate pressure vessel and disposable filter pack to isolate the product to be filtered from the housing. It reduces the amount of labor and operator exposure to impurities and cleaning solvents involved with filter change-outs and cleaning of conventional housings.
3M™ CUNO™ CTG-Klean System Filter Pack with Betapure™ NT-T Series Filter Cartridge
3M™ CUNO™ CTG-Klean System Filter Pack with Betapure™ NT-T Series Cartridge is an enclosed system that uses a separate pressure vessel and disposable filter pack to isolate the product to be filtered from the housing. It reduces the labor and operator exposure to impurities and cleaning solvents involved with filter change-outs and cleaning of conventional housings.
3M™ Liqui-Cel™ EXF Series Membrane Contactor
Our 3M™ Liqui-Cel™ EXF Series Membrane Contactors transfer gases to and from compatible liquid streams. These membrane contactors utilize a microporous hollow fiber membrane inside a device designed to enhance flow dynamics and take full advantage of the large membrane surface area for stripping dissolved gases. With proper system design, ultra-low levels of dissolved gas can be achieved.
3M™ Liqui-Cel™ SP Series Membrane Contactor
Commonly used to removed bubbles and dissolved gases from liquids with low surface tensions, our 3M™ Liqui-Cel™ SP Series Membrane Contactors use a non-porous, gas-permeable hollow fiber. This membrane technology makes it possible to degas and debubble compatible solutions containing surfactants or organic solvents.
Other Capabilities: Design and Install
Ultra-filtration Module
n an RO system, the UF module acts as a pre-treatment step, serving to protect the RO membranes from fouling and potential damage caused by larger particles. The UF process effectively filters out contaminants such as colloids, suspended solids, and microorganisms, improving the feed water quality for subsequent RO treatment.
Activated Carbon Filtration System
Activated carbon is known for its exceptional adsorption capabilities, which enable it to attract and trap a wide range of contaminants, including chlorine, volatile organic compounds (VOCs), and other chemicals. By incorporating an ACF module into an RO system, the overall water treatment process becomes more comprehensive, ensuring that the water delivered is not only free from harmful substances but also aesthetically pleasing in terms of taste and odor.
Water Softening System
The Water Softening Module typically incorporates ion exchange technology, where calcium and magnesium ions are replaced with sodium ions. This process helps prevent scale formation on the RO membranes, ensuring optimal water purification efficiency. By reducing the hardness of the water entering the RO system, the module contributes to longer membrane life, improved water quality, and reduced maintenance costs.
RO System (Vessel & Membrane)
The membrane module is the heart of a Reverse Osmosis system. It consists of semi-permeable membranes that selectively allow water molecules to pass through while blocking impurities and contaminants. The membranes employ a sophisticated filtration process, effectively removing dissolved salts, bacteria, and other pollutants from the water, yielding high-quality and potable water. Regular maintenance and monitoring of the membrane modules are essential to ensure optimal performance and longevity of the RO system.
Degassing System
Liqui-Cel® degassing membrane modules are essential components in Reverse Osmosis (RO) systems, designed to efficiently remove dissolved gases from water. These modules utilize a unique hollow fiber membrane technology that allows for the effective removal of oxygen, carbon dioxide, and other gases present in the feed water.
Deionization Resin Mixed Bed
In a RO system, the mixed bed module serves as a polishing stage to further purify water after it has undergone primary filtration through reverse osmosis membranes. The cation exchange resin and anion exchange resin work synergistically to remove any remaining ions and impurities that may have passed through the initial RO filtration.
Cation exchange resin attracts and exchanges positively charged ions (cations) such as calcium and magnesium, while anion exchange resin attracts and exchanges negatively charged ions (anions) like chloride and sulfate. This dual ion-exchange process ensures the removal of a wide range of contaminants, resulting in high-purity water suitable for various industrial, laboratory, and specialized applications.
Chemical Dosing System
Key components of a dosing system in an RO setup include pumps, controllers, and chemical tanks. The pumps are responsible for accurately delivering the required chemicals in proportion to the water flow, while controllers monitor and adjust the dosing rates based on real-time conditions. Chemical tanks store the treatment chemicals, preventing contamination and ensuring a steady supply.
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